Western Nanofabrication Facility

Academic Rates

Daily Access Fee

- $30 per day, maximum $ 300/month Access (key card), gowning (gloves, wipes, frocks, shoe covers, caps), all analytical equipment not listed below, and basic laboratory chemicals and reagents (solvents, cleaning chemicals, wet etching chemicals, acids including hydrofluoric acid, DI water), available labware and dishwashing, waste containers and disposal.
The entrance fee is waived when access involves only SEM imaging. In addition there is no entrance fee when entering the nanofab to retrieve a sample or purchase supplies. However, in this later case, to reduce the use of clean gowning, we suggest the users contact Tim Goldhawk and ask him to place the samples/suppplies in the entrance of the nanofab

Staff Time - service work and equipment training:


- Faculty of Science accounts: $60/hr.
- non-FOS academic accounts: $90/hr
- Industrial training and instrument operation: $180/hr
- Industrial consulting and process development: $300/hr.

1540XB SEM/EDX and FIB


- $60/hr SEM/EDX equipment charge
- $40/hr FIB surcharge in addition to SEM charges ($100/hr)

1530 SEM and E-beam Lithography

- $50/hr equipment charge

SEM Introductory Training


- $150 (includes 3 hour introductory session plus 1.5 hours of hands-on practice).

Spectroscopic Ellipsometer


-$25/hr, $25 minimum charge

Tencor P7 profilometer


--$50/hr, $100 minimum charge

NXQ4006 and MA6 Mask Aligners


-$50/hr, $25 minimum charge

Reactive Ion Etch and oxygen plasma - Trion

- $50/hour

Plasma Enhanced Chemical Vapour Deposition (PECVD)

- $5 per plasma minute

Rapid Thermal Annealer


- $50 per run <1000C
- $100 per run 1000C and above.

Metal Deposition (Standard metals)


-Osmium Coater -$10 per run
-E-beam evaporation - $50 per run (<1000 Ǻ metal ) plus $5 per 250 Ǻ (>1000 Ǻ metal )
-Surcharge for gold based on weight used and current cost per gram.
-Sputter Deposition - $25 per hour, $50 minimum

Film Spin Coating and Developing

- $20 per substrate, includes cost of standard resists and developer

Dicing Saw


-$50 for first hour, $25 each additional hour, $50 minimum