Western Nanofabrication Facility

Links to Microsoft Booking Calendars for Nanofab


1530 SEM

Yellow Room (For resist processing / photolithography / fume hood / AxioScope)

Wet Chemistry Lab (For PDMS processing or Ozone cleaner)

NXQ4006 Mask Aligner (You must also book the Yellow Room Calendar)

Central Fumehood

Angstrom Evaporator

Edwards Sputtering

Woollam Ellipsometer

Hoser Evaporator

Trion RIE