Western Nanofabrication Facility

Nanofabrication Facility Instrumentation

Characterization

1540XB FIB/SEM

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Tencor P7 Profilometer

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1530 SEM

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Woollam Ellipsometer

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Leica Stereozoom

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Zeiss Axioskop

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Mitutoyo Finescope

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Lithography

Neutronix-Quintel NXQ4006 Mask Aligner

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Solitec 5110 coater/developer

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Karl Suss MA6 Mask Aligner

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CEE 200 spinner

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Zeiss 1530 e-beam Lithography

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Yield Engineering YES-3TA HMDS oven

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Zeiss 1540XB FIB lithography

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Innopsys Innostamp

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Deposition

Angstrom e-beam Deposition

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IKO Electroplating Bench

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Custom e-beam Deposition

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Filgen Osmium Plasma Coater

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STS PECVD

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Edwards Auto500 Sputtering

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Etching

Trion Orion RIE

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Miscellaneous

Grey Lab Spinner

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Ozone Cleaner

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Spin Rinse Dryer

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Dicing Saw

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