Western Nanofabrication Facility
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Flat-Rate SEM imaging service
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Lithography
CEE spinner
MJB3
ebeam lithography
YES HMDS oven
MA6
Solitec spinner
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OPC 80T
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ebeam 1
STS PECVD
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STS RIE
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1540XB SEM
1530 SEM
KLA Tencor P7
Zeiss Axioskop2
Leica stereozoom
Woolam VASE
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Jipelec RTA
Spin Rinse
Dicing Saw
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CEE 200 Spinner